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扫描电镜 CD-SEM S-8840

发布时间: 2018-03-23

  • 扫描电镜 CD-SEM S-8840
  • 扫描电镜 CD-SEM S-8840
  • 扫描电镜 CD-SEM S-8840

Original Hitachi CD-SEM 8840  Specification and Key Features:

  1. Hitachi CD-SEM S-8840 General

    • Wafer size :  8-inch or 6-inch (Special carrier for 2 to 5 inch wafers)
    • Principle of CD measurement : Cursor and line profile measurement
    • CD measurement range : 0.1 to 10 μm
    • CD measurement reproducibility : ±1% or 0。005 μm (3 sigma) (threshold method),whichever larger
    • Throughput : 26 wafers/hour (in continuous measurement),1 point/chip, 5 chips/wafer
    • Secondary electron image resolution : 5 nm (50 Å) (at accelerating voltage of 0.8 kV with reference specimen dedicated for resolution measurement)
    • Magnification : x1000 to  x150,000 (SEM image), About x110 (optical microscope image)
  2. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Specimen Stage

    • Movement range : X and Y ; 0 to 200 mm
    • Stage drive : Pulse motor
    • Control and speed : Computer-controlled operation, max。 speed 50 mm/s
  3. Hitachi CD-SEM S-8840 Wafer Loader

    • Wafer transfer from cassette to loader chamber : Auto transfer via cassette-to-cassette auto loader
    • Wafer transfer from loader chamber to stage : Auto evacuation and auto loading
  4. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Cassette-to-Cassette Auto Loader

    • Principle of loading : Loading via arm type robot for random access using two cassettes
    • Chucking : Vacuum chucking on back of wafer
    • Orientation flat setting : Non-contact auto detection via optical sensor
  5. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Electron Optics

    • Electron gun : Schottky emission type (having high brightness and long service life)
    • Accelerating voltage : 500 to 1300 V (variable in 10 V steps)
    • Lens system : Electromagnetic condenser lens system, FCM objective lens
    • Secondary electron detection : 2-stage detection system
    • Objective lens aperture : Heating type movable aperture (4 openings selectable outside column), fine adjustment possible
    • Scanning coil : 2-stage deflection
    • Stigmator coil : 8-pole electromagnetic type (X, Y)
    • Probe current monitoring : Faraday cup incorporated, with automatic measurement function
    • Optical microscope : 1。2-mm-square visual field, monochrome image
  6. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Control and Display System

    • Viewing control CRT : EWS (GUI) 20-inch monitor, integral processing image display, interactive computer operation, wafer map display, measured value indication, stage coordinate indication, etc。
    • Scanning modes : TV scan, raster rotation, auto brightness/contrast control
    • Photographing : Photographic recording unit, effective visual field 80 x 80 mm (option)
    • Safety device : Equipped with emergency shut-off switch
  7. Hitachi CD-SEM S-8640 CD Measurement Data Processing System (1 GB hard disk for system program)

    • File storage : 3.5 inch floppy disk drive, 3.5 inch magneto-optic disk drive, with storage function for various parameter files
    • Data processing : Average value, standard deviation, maximum/minimum values
    • Printout : 80-character thermal printer
    • Hard disk capacity varies with instrument serial no
  8. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Vacuum System

    • Principle of evacuation : Full-automatic dry and clean evacuation
    • Vacuum pumping : Ion pump (3 units), turbo molecular pump (2 units), rotary pump (option)(with foreline trap) (2 units)
    • Safety device : Equipped with power fail/vacuum level safety devices
  9. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Dimensions

    • Main column unit : 1170W x 1890D x 1650H mm, 1100 kg
    • Display unit : 600W x 1331D x 1800H mm, 320 kg
    • Power supply unit : 535W x 600D x 1500H mm, 200 kg
    • Rotary pump(option) : 360W x 640D x 520H mm, 30 kg/unit
  10. Hitachi CD-SEM S-8840 Critical Dimension Scanning Electron Microscope Standard System Composition

    • Main column unit • • • • • • • • • • • • • • • • • • • • • 1
    • Display unit • • • • • • • • • • • • • • • • • • • • • • • • • 1
    • Power supply unit• • • • • • • • • • • • • • • • • • • • • 1
    • Photographing unit (option)• • • • • • • • • • • • • •1
    • Rotary pump (option) • • • • • • • • • • • • • • • • • • 2
    • Instruction manual • • • • • • • • • • • • • • • • • • • • 1

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